Micro-Polar Effects of Flow Features of Slurries in Chemical Mechanical Polishing Process

ZHANG Chao-hui;LUO Jian-bin

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Journal of Beijing Jiaotong University ›› 2005, Vol. 29 ›› Issue (1) : 74-77.

Micro-Polar Effects of Flow Features of Slurries in Chemical Mechanical Polishing Process

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