Design of magnetic fluid seal of small vacuum coating machine

YU Wenjuan,LI Decai,LI Yanwen,ZHANG Zhili,DONG Jiahao

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Journal of Beijing Jiaotong University ›› 2021, Vol. 45 ›› Issue (5) : 124. DOI: 10.11860/j.issn.1673-0291.20210025

Design of magnetic fluid seal of small vacuum coating machine

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