化学机械抛光中抛光垫作用分析

化学机械抛光中抛光垫作用分析

张朝辉;杜永平;常秋英;雒建斌

Analysis on Pad Effects in Chemical Mechanical Polishing

ZHANG Chao-hui;DU Yong-ping;CHANG Qiu-ying;LUO Jian-bin

. 2007, (1): 18 -21 .